Solid-state imaging device and method of manufacturing the same
AssigneeSony Corporation
InventorIkuo Yoshihara
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AssigneeSony Corporation
InventorIkuo Yoshihara
Estimating the term…
A solid-state imaging device with a semiconductor substrate; a pixel formation region in the substrate and including a pixel made of a photoelectric conversion element; and an element isolation portion in the substrate and including an element isolation insulating layer and an impurity element isolation region. The element isolation insulating layer is positioned in a surface of the substrate. The impurity element isolation region is positioned under the element isolation insulating layer and within the substrate. The impurity element isolation region has at least a portion with a width that is narrower than that of the element isolation insulating layer. The photoelectric conversion element extends to a position under the element isolation insulating layer of the element isolation portion.
A solid-state imaging device comprising:
A solid-state imaging device comprising:
A method of manufacturing a solid-state imaging device having a pixel formation region including a pixel made of a photoelectric conversion element, said method comprising the steps of:
Dependencies are inferred from the claim text.