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US 2008/0073604 A1Published application
Imprint apparatus and imprint method
AssigneeCanon Kabushiki Kaisha
InventorsNobuhito Suehira, Junichi Seki, Hideki Ina, Koichi Sentoku
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AssigneeCanon Kabushiki Kaisha
InventorsNobuhito Suehira, Junichi Seki, Hideki Ina, Koichi Sentoku
Estimating the term…
An imprint apparatus, comprising a first holder for holding a mold having an imprint pattern; a second holder for holding a workpiece to which the imprint pattern is transferred; a first illumination system for irradiating a mark for determining a position of the mold and a mark for determining a position of the workpiece with light; a first and second optical systems for imaging the marks for the mold and workpiece at a first and second observation points respectively; an imaging optical system; a first and second image pick-up devices for observing the marks for the mold and workpiece respectively; and at least one of a first drive mechanism for moving the first image pick-up device while following movement of the first observation point and a second drive mechanism for moving the second image pick-up device while following movement of the second observation point.
An imprint apparatus, comprising:
An alignment method for imprint apparatus, comprising:
An alignment method of aligning a first object with a second object, comprising:
An alignment method of imaging alignment marks separately provided to a workpiece having a flat shape and to a mold having an imprint pattern by using respective corresponding image pick-up devices and aligning the workpiece and the mold which are opposed to each other in an in-plane direction based on information from the image pick-up devices, comprising:
Dependencies are inferred from the claim text.