Ion beam measuring method and ion implanting apparatus

An ion beam measuring method to be performed in an ion implanting apparatus for, not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, said ion implanting apparatus further having a forestage beam restricting shutter which is disposed in a vicinity of an upstream of said forestage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, a forestage shutter driving apparatus which drives said forestage beam restricting shutter in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage beam restricting shutter in the y direction by said forestage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said forestage beam restricting shutter, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said forestage beam restricting shutter;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said forestage beam restricting shutter;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a diverging angle calculating step of, using the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, and a distance L between said forestage beam restricting shutter and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmax=tan−1{(dyb−dyf)/2L}

An ion beam measuring method to be performed in an ion implanting apparatus for, not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, said ion implanting apparatus further having a forestage beam restricting shutter which is disposed in a vicinity of an upstream of said forestage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, a forestage shutter driving apparatus which drives said forestage beam restricting shutter in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage beam restricting shutter in the y direction by said forestage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said forestage beam restricting shutter, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said forestage beam restricting shutter;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said forestage beam restricting shutter;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a beam size calculating step of, from the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, a distance L between said forestage beam restricting shutter and said poststage beam restricting shutter, a distance L1 between said forestage beam-restricting shutter and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2)

An ion implanting apparatus for, not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam;
• a forestage beam restricting shutter which is disposed in a vicinity of an upstream of said forestage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a forestage shutter driving apparatus which drives said forestage beam restricting shutter in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage beam restricting shutter in the y direction by said forestage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said forestage beam restricting shutter, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said forestage beam restricting shutter;
• (b) a forestage center position calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a center position ycf in the y direction of the ion beam at the position of said forestage beam restricting shutter;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage center position calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a center position ycb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) an angle deviation calculating process of, using the center position ycf obtained in said forestage center position calculating process, the center position ycb obtained in said poststage center position calculating process, and a distance L between said forestage beam restricting shutter and said poststage beam restricting shutter, obtaining an angle deviation θy in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• θy=tan−1{(ycb−ycf)/L}.

An ion implanting apparatus for, not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam;
• a forestage beam restricting shutter which is disposed in a vicinity of an upstream of said forestage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a forestage shutter driving apparatus which drives said forestage beam restricting shutter in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage beam restricting shutter in the y direction by said forestage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said forestage beam restricting shutter, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said forestage beam restricting shutter;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said forestage beam restricting shutter;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a diverging angle calculating process of, using the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, and a distance L between said forestage beam restricting shutter and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmax=tan−1{(dyb−dyf)/2L}

An ion implanting apparatus for, not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam;
• a forestage beam restricting shutter which is disposed in a vicinity of an upstream of said forestage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a forestage shutter driving apparatus which drives said forestage beam restricting shutter in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage beam restricting shutter in the y direction by said forestage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said forestage beam restricting shutter, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said forestage beam restricting shutter;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said forestage beam restricting shutter;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a beam size calculating process of, from the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, a distance L between said forestage beam restricting shutter and said poststage beam restricting shutter, a distance L1 between said forestage beam restricting shutter and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2).

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes, a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage center position calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a center position ycf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage center position calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a center position ycb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• an angle deviation calculating step of, using the center position ycf obtained in said forestage center position calculating step, the center position ycb obtained in said poststage center position calculating step, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining an angle deviation θy in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• θy=tan−1{(ycb−ycf)/L}

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes, a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a diverging angle calculating step of, using the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmax=tan−1{(dyb−dyf)/2L}

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes, a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a beam size calculating step of, from the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, a distance L1 between said inlets of said forestage multipoints Faraday and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2)

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage center position calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a center position ycf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage center position calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a center position ycb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• an angle deviation calculating step of, using the center position ycf obtained in said forestage center position calculating step, the center position ycb obtained in said poststage center position calculating step, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining an angle deviation θy in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• θy=tan−1{(ycb−ycf)/L}

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a diverging angle calculating step of, using the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmaxtan−1{(dyb−dyf)/2L}

An ion beam measuring method to be performed in an ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus having a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, and at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday is substantially parallel to the x direction, said ion implanting apparatus further having a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction, a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction, and a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction, said ion beam measuring method comprising:

• a forestage beam current density distribution measuring step of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• a forestage beam size calculating step of, from the beam current density distribution obtained in said forestage beam current density distribution measuring step, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• a poststage beam current density distribution measuring step of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• a poststage beam size calculating step of, from the beam current density distribution obtained in said poststage beam current density distribution measuring step, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and
• a beam size calculating step of, from the beam size dyf obtained in said forestage beam size calculating step, the beam size dyb obtained in said poststage beam size calculating step, a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, a distance L1 between said inlets of said forestage multipoints Faraday and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2)

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at apposition of said inlets of said forestage multipoints Faraday;
• (b) a forestage center position calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a center position ycf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage center position calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a center position ycb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) an angle deviation calculating process of, using the center position ycf obtained in said forestage center position calculating process, the center position ycb obtained in said poststage center position calculating process, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining an angle deviation θy in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• θy=tan−1{(ycb−ycf)/L}.

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a diverging angle calculating process of, using the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmax=tan−1{(dyb−dyf)/2L}.

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a mask which is disposed in a vicinity of an upstream of said forestage multipoints Faraday, and which has an aperture through which the ion beam passes;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which passes said aperture of said mask, and which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a beam size calculating process of, from the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, a distance L1 between said inlets of said forestage multipoints Faraday and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2).

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• (b) a forestage center position calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a center position ycf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage center position calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a center position ycb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) an angle deviation calculating process of, using the center position y,f obtained in said forestage center position calculating process, the center position ycb obtained in said poststage center position calculating process, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining an angle deviation θy in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• θy=tan−1{(ycb−ycf)/L}.

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a diverging angle calculating process of, using the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, and a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, obtaining a diverging angle αmax in the y direction of the ion beam, based on a following equation or an equation which is mathematically equivalent to the equation:
• αmax=tan−1{(dyb−dyf)/2L}.

An ion implanting apparatus for, through scanning in x direction, or not through scanning in x direction, irradiating a target with an ion beam which has a ribbon-like shape where a size in x direction is larger than a size in y direction that is substantially orthogonal to the x direction, said ion implanting apparatus comprising:

• a forestage multipoints Faraday and a poststage multipoints Faraday on upstream and downstream sides of said target, respectively, each of said forestage multipoints Faraday and said poststage multipoints Faraday being configured by juxtaposing in the x direction plural detectors which measure a beam current of the ion beam, at least one of lines respectively connecting together upper ends and lower ends of plural inlets of said forestage multipoints Faraday being substantially parallel to the x direction;
• a forestage Faraday driving apparatus which drives said forestage multipoints Faraday in the y direction;
• a poststage beam restricting shutter which is disposed in a vicinity of an upstream of said poststage multipoints Faraday to block the ion beam, and which has a side that is substantially parallel to the x direction;
• a poststage shutter driving apparatus which drives said poststage beam restricting shutter in the y direction;
• and
• a control apparatus which performs:
• (a) a forestage beam current density distribution measuring process of, while driving said forestage multipoints Faraday in the y direction by said forestage Faraday driving apparatus, measuring a change of a beam current of the ion beam which is incident on said forestage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said inlets of said forestage multipoints Faraday;
• (b) a forestage beam size calculating process of, from the beam current density distribution obtained in said forestage beam current density distribution measuring process, obtaining a beam size dyf in the y direction of the ion beam at the position of said inlets of said forestage multipoints Faraday;
• (c) a poststage beam current density distribution measuring process of, while driving said poststage beam restricting shutter in the y direction by said poststage shutter driving apparatus, measuring a change of a beam current of the ion beam which passes an outside of the side of said poststage beam restricting shutter, and which is incident on said poststage multipoints Faraday, to obtain a beam current density distribution in the y direction of the ion beam at a position of said poststage beam restricting shutter;
• (d) a poststage beam size calculating process of, from the beam current density distribution obtained in said poststage beam current density distribution measuring process, obtaining a beam size dyb in the y direction of the ion beam at the position of said poststage beam restricting shutter;
• and (e) a beam size calculating process of, from the beam size dyf obtained in said forestage beam size calculating process, the beam size dyb obtained in said poststage beam size calculating process, a distance L between said inlets of said forestage multipoints Faraday and said poststage beam restricting shutter, a distance L1 between said inlets of said forestage multipoints Faraday and said target, and a distance L2 between said target and said poststage beam restricting shutter, obtaining a beam size dyt in the y direction of the ion beam on said target, based on a following equation or an equation which is mathematically equivalent to the equation:
• dyt=(L2/L)dyf+(L1/L)dyb (where L=L1+L2).