Laser crystallization apparatus and crystallization method

A laser crystallization apparatus comprising:

• a plurality of laser light sources which generate pulse laser lights on the basis of an input of a laser light generation indicating signal;
• and a plurality of phase shifters which are provided on optical paths of the respective laser lights and which modulate the pulse laser lights to transmit the pulse laser lights having a predetermined light intensity distribution, wherein the plurality of pulse laser lights modulated by the phase shifters are irradiated to a thin film provided on a processing substrate to melt and crystallize irradiated areas of the thin film, the laser crystallization apparatus comprising:
• a substrate holding stage which mounts the processing substrate and which continuously moves in a predetermined direction related to pulse laser light irradiating positions;
• position measuring means which measures a position of the substrate holding stage continuously moving in the predetermined direction;
• and
• signal generating means which indicates the generation of the pulse laser light on the basis of the position of the substrate holding stage measured by the position measuring means.

A laser crystallization method comprising:

• continuously moving a substrate holding stage mounted a processing substrate thereon in a predetermined direction;
• measuring a predetermined position on the continuously moving substrate holding stage;
• outputting a laser light generation indicating signal which indicates generation of laser light on the basis of the measured position information;
• generating pulse laser light on receipt of the laser light generation indicating signal;
• modulating the pulse laser light;
• and
• irradiating the modulated pulse laser light on the processing substrate to melt and crystallize an irradiated area of a crystallization thin film provided on the processing substrate.