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AssigneeHitachi High-Technologies Corporation
InventorsHiroshi Makino, Masaki Hasegawa, Momoyo Enyama
Estimating the term…
There is a need for inspecting a heightwise variation in a sample. A holder holds a sample. A charge control unit charges the sample held by the holder. A retarding power supply applies a voltage to the sample held by the holder. An electro-optic system radiates an electron beam to the sample applied with a voltage by the retarding power supply and images a mirror electron returning near the surface of the sample. An image processing unit processes a mirror image resulting from imaging the mirror electron. The image processing unit outputs information corresponding to a difference between mirror images, i.e., a mirror image acquired by imaging the mirror electron and a mirror image for a prepared standard preparation, as a heightwise variation in a sample.
An inspection system for inspecting a heightwise variation in a sample, comprising:
A program readable on a computer for inspecting a heightwise variation in a sample,
An inspection method of inspecting a heightwise variation in a sample, comprising the steps of:
Dependencies are inferred from the claim text.