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US 2008/0073531 A1Published application
Charged particle beam system and a method for inspecting a sample
AssigneeApplied Materials Israel Ltd.
InventorsIgor Petrov, Guy Eitan, Albert Karabekov
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Abstract
A method and system for inspecting an inspected object. The system includes: a detector adapted to detect charged particles scattered from a sample; a magnetic lens adapted to generate a magnetic field such as to direct a charge particle beam towards a sample and an first electrode positioned very close to an inspected object, wherein the first electrode comprises a very thin portion that defines a narrow aperture through which the charged particle beam can propagate.
Claims10
A system comprising:
- a detector adapted to detect charged particles scattered from a sample;
- a magnetic lens adapted to generate a magnetic field such as to direct a charge particle beam towards a sample and an first electrode positioned very close to an inspected object, wherein the first electrode comprises a very thin portion that defines a narrow aperture through which the charged particle beam can propagate.
A method for detecting charge particle electrons;
- the method comprises:
- directing a charge particle beam towards an inspected object, via a narrow aperture defined in a very thin portion that is included within a first electrode positioned very close to the inspected object;
- and detecting charged particle scattered from the inspected object.
Dependencies are inferred from the claim text.