Plasma Nozzle Array for Providing Uniform Scalable Microwave Plasma Generation

A method for configuring a microwave plasma nozzle array, comprising the steps of:

• directing a first pair of microwaves into a microwave cavity in opposing directions along a first axis;
• directing a second pair of microwaves into the microwave cavity in opposing directions along a second axis, the first axis being normal to the second axis such that the first and the second pairs of microwaves interfere and form high-energy regions that are stationary within the microwave cavity;
• adjusting a phase of at least one of the microwaves to control the high-energy regions;
• and
• disposing a nozzle array at least partially in the microwave cavity so that one or more nozzle elements of the nozzle array are configured to receive microwave energy from a corresponding one of the high-energy regions.

A microwave plasma nozzle array unit, comprising:

• a microwave cavity;
• and
• an array of nozzles, each of said nozzles including:
• a gas flow tube adapted to direct a gas flow therethrough and having an inlet portion and an outlet portion;
• and
• a rod-shaped conductor axially disposed in said gas flow tube, said rod-shaped conductor having a portion disposed in said microwave cavity to receive microwaves and a tip positioned adjacent said outlet portion.

A microwave plasma system, comprising:

• a microwave source;
• a pair of isolators operatively connected to said microwave source;
• a microwave cavity having a pair of inlets;
• a pair of waveguides, each of said waveguides being operatively connected to a corresponding one of said isolators and to a corresponding one of said inlets of said microwave cavity;
• and
• a pair of non-rotating phase shifters, each of said non-rotating phase shifters being operatively connected to a corresponding one of said waveguides and to a corresponding one of said isolators;
• and
• an array of nozzles, each of said nozzles including:
• a gas flow tube adapted to direct a gas flow therethrough and having an inlet portion and an outlet portion;
• and
• a rod-shaped conductor axially disposed in said gas flow tube, said rod-shaped conductor having a portion disposed in said microwave cavity to receive microwaves and a tip positioned adjacent said outlet portion.

A microwave plasma system, comprising:

• a microwave source;
• an isolator operatively connected to said microwave source;
• a microwave cavity having an inlet;
• a waveguide operatively connected to said isolator and to said inlet of said microwave cavity;
• a non-rotating phase shifter operatively connected to said waveguide and said isolator;
• a circulator operatively connected to said waveguide and configured to direct microwaves to said non-rotating phase shifter;
• a sliding short circuit operatively connected to said microwave cavity;
• and
• an array of nozzles, each of said nozzles including:
• a gas flow tube adapted to direct a gas flow therethrough and having an inlet portion and an outlet portion;
• and
• a rod-shaped conductor axially disposed in said gas flow tube, said rod-shaped conductor having a portion disposed in said microwave cavity to receive microwaves and a tip positioned adjacent said outlet portion.

A microwave plasma system, comprising:

• a microwave source;
• a pair of isolators operatively connected to said microwave source;
• a microwave cavity having a pair of inlets;
• a pair of waveguides, each of said waveguides being operatively connected to a corresponding one of said isolators and to a corresponding one of said inlets of said microwave cavity;
• a pair of non-rotating phase shifters, each of said non-rotating phase shifters being operatively connected to a corresponding one of said waveguides and to a corresponding one of said isolators;
• a pair of sliding short circuits, each of said sliding short circuits being operatively connected to said microwave cavity;
• and
• an array of nozzles, each of said nozzles including:
• a gas flow tube adapted to direct a gas flow therethrough and having an inlet portion and an outlet portion;
• and
• a rod-shaped conductor axially disposed in said gas flow tube, said rod-shaped conductor having a portion disposed in said microwave cavity to receive microwaves and a tip positioned adjacent said outlet portion.

A microwave plasma system, comprising:

• a microwave source;
• a microwave cavity having four inlets;
• four waveguides, each of said waveguides being operatively connected to a corresponding one of said inlets of said microwave cavity and said microwave source;
• four non-rotating phase shifters, each of said non-rotating phase shifters being operatively connected to a corresponding one of said waveguides and said microwave source;
• four circulators, each of said circulators being operatively connected to a corresponding one of said waveguides and configured to direct microwaves generated by said microwave source to at least one of said non-rotating phase shifters;
• and
• an array of nozzles, each of said nozzles including:
• a gas flow tube adapted to direct a gas flow therethrough and having an inlet portion and an outlet portion;
• and
• a rod-shaped conductor axially disposed in said gas flow tube, said rod-shaped conductor having a portion disposed in said microwave cavity to receive microwaves and a tip positioned adjacent said outlet portion.