Alignment method and mounting method using the alignment method
AssigneeToray Engineering Co., Ltd.
InventorsAkira Yamauchi, Mikio Kawakami
Life of this patent
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Abstract
Positioning recognition marks are read by movable recognition device for positioning objects to be bonded to each other. An alignment method includes a step of reading the recognition marks during movement of the recognition device before its complete stop, and a step of identifying absolute positions of the recognition marks by correcting the mark recognition positions having been read based on a position feedback signal of the moving recognition device. A mounting method using the alignment method is also disclosed. It is possible to maintain a high alignment accuracy, eliminate necessity of assuring a settling time for complete stop of the movable recognition device, and significantly reduce the alignment time and mounting tact.
Claims22
An alignment method for positioning objects to be bonded to each other by reading positioning recognition marks provided on both objects by a two-sight recognition means having sights in directions toward both objects, said alignment method comprising a step of reading both of said recognition marks simultaneously and synchronously with each other.
A mounting method for mounting one object onto the other object to be bonded to each other after positioning both objects to each other by using an alignment method, said alignment method positioning both objects to each other by reading positioning recognition marks provided on both objects by a two-sight recognition means having sights in directions toward both objects, said alignment method comprising a step of reading both of said recognition marks simultaneously and synchronously with each other.
Dependencies are inferred from the claim text.