Nano-Piezoelectronics

A biogenerator, comprising:

• a. an array of piezoelectric nanowires extending upwardly form a substrate;
• b. an electrode having a corrugated surface disposed parallel to the substrate so that the corrugated surface faces the piezoelectric nanowires;
• and
• c. a fluid-tight sealant disposed about a portion of the substrate, the array and the electrode so as to prevent fluids from entering the array.

A device for detecting both point location and point pressure of an object placed against the device, comprising:

• a. a substrate;
• b. plurality of nanowires extending upwardly from the substrate;
• and
• a plurality of pixilated conductive electrodes disposed in a layer that is placed on top of the zinc oxide nanowires.
• d.

A method of making a force sensor, comprising the actions of:

• a. growing a plurality of aligned piezoelectric nanowires to a predetermined height on a single crystal substrate;
• b. spin coating a polymer layer onto the substrate so that the polymer layer surrounds the piezoelectric nanowires but has a thickness less than the predetermined height of the piezoelectric nanowires;
• c. depositing a layer of a conductive material on the polymer layer so as to be in contact with the piezoelectric nanowires;
• d. dissolving and removing the polymer layer, thereby leaving a semiconductor piezoelectric member having an outer edge;
• e. sealing the outer edge with an insulating material;
• and
• f. electrically coupling the layer of conductive material and a conductive layer coupling the nanowires to an electrical sensor.