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US 2007/0200477 A1Published application
Nanofabrication
AssigneeUniversity of Massachusetts
InventorsMark Tuominen, Mustafa Bal, Thomas Russell, Andrei Ursache
Life of this patent
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Abstract
Pathways to rapid and reliable fabrication of three-dimensional nanostructures are provided. Simple methods are described for the production of well-ordered, multilevel nanostructures. This is accomplished by patterning block copolymer templates with selective exposure to a radiation source. The resulting multi-scale lithographic template can be treated with post-fabrication steps to produce multilevel, three-dimensional, integrated nanoscale media, devices, and systems.
Claims35
A nanostructure comprising:
- a substrate surface, at least a portion of which is conductive or semiconductive;
- a first set of nanowires extending from the conductive or semiconductive substrate surface, wherein one end of the nanowires is in electrical communication with the conductive or semiconductive surface;
- and
- a second set of nanowires extending from the substrate surface,
- wherein the first and second sets of nanowires are separated from each other by a region of the substrate surface having a dimension greater than a length of the nanowires, the region of the substrate surface being devoid of nanowires.
2 more elements
(canceled)
28-31. (canceled)
A device comprising:
- a substrate surface comprising at least one electrode;
- an array of magnetic nanowires extending vertically from the surface in electrical communication with at least one electrode, wherein the array of nanowires is periodic on the tens of nanometers scale,
- wherein the device is a magnetotransfer device.
A nanostructure comprising:
- a substrate surface, at least a portion of which is conductive or semiconductive;
- and
- at least one a first set of nanowires extending from the conductive or semiconductive substrate surface, wherein one end of the nanowires is in electrical communication with the conductive or semiconductive surface,
- wherein the nanostructure is a multilayer nanostructure.
1 more element
Dependencies are inferred from the claim text.