Method of patterning oxide superconducting films
AssigneeAmerican Superconductor Corporation
InventorsThomas Kodenkandath, Wei Zhang
Life of this patent
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Abstract
A process for preparing a superconductor article includes depositing a precursor solution onto a substrate to form a precursor film, the precursor solution comprising precursor components to a rare earth-alkaline earth metal-transition metal oxide in one or more solvents, decomposing the precursor film to form an intermediate film comprising the rare earth metal, the alkaline earth metal, and the transition metal of the first precursor solution, selectively removing portions of the intermediate film, wherein a patterned intermediate film is obtained, and treating the patterned intermediate film to form a rare earth-alkaline earth metal-transition metal oxide superconductor.
Claims39
A method for preparing a superconductor article, comprising the steps of:
- providing an intermediate metaloxy film on a substrate, the intermediate metaloxy film comprising precursor components to a rare earth-alkaline earth metal-transition metal oxide;
- removing selected portions of the intermediate metaloxy fluoride film to obtain a patterned film;
- and
- treating the patterned intermediate film to form a rare earth-alkaline earth metal-transition metal oxide superconductor.
A method for preparing a superconductor article, comprising the steps of:
- depositing an intermediate metaloxy fluoride film on a substrate, the intermediate metaloxy fluoride film comprising precursor components to a rare earth-alkaline earth metal-transition metal oxide, wherein the substrate is at least about 1 mm wide;
- removing selected portions of the intermediate metaloxy fluoride film to obtain a patterned film comprising a plurality of longitudinally arranged metaloxy stripes having a width of greater than about 1 mm and gaps between said stripes of about 0.1 to about 0.5 mm;
- and
- treating the patterned intermediate film to form a rare earth-alkaline earth metal-transition metal oxide superconductor.
An oxide superconducting tape, comprising:
- a biaxially textured substrate greater than 1 cm in width;
- a patterned superconducting layer formed on the substrate, wherein said superconducting layer comprises a rare earth barium copper oxide superconductor, the pattern defining a plurality of parallel stripes of oxide superconductor each having a width of at least 1 mm.
A metal oxyfluoride tape, comprising:
- a biaxially textured substrate greater than 1 cm in width;
- a patterned metal oxyfluoride layer deposited on the substrate, wherein said metal oxyfluoride layer comprises a rare earth metal, an alkaline earth metal, and a transition metal of a rare earth barium copper oxide superconductor, the pattern defining a plurality of parallel stripes of metal oxyfluoride each having a width of at least 1 mm.
A process for preparing a superconductor article, comprising the steps of:
- depositing an intermediate metaloxy film onto a substrate, the intermediate metaloxy film comprising precursor components to a rare earth-alkaline earth metal-transition metal oxide in one or more solvents,
- passing a scribing tool comprising a plurality of scribing surfaces through the intermediate metaloxy film to selectively remove portions of the intermediate film, wherein a patterned intermediate film is obtained;
- treating the patterned intermediate film to form a rare earth-alkaline earth metal-transition metal oxide superconductor;
- depositing a protective layer over the patterned oxide superconductor;
- and
- slitting the pattern oxide superconductor along the length of the gap to obtain two or more oxide superconducting wires.
Dependencies are inferred from the claim text.