Method and apparatus to reduce random yield loss
AssigneeSynopsys, Inc.
InventorsSubarnarekha Sinha, Qing Su, Charles Chiang
Life of this patent
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Abstract
One embodiment of the present invention provides a system that reduces random yield loss. During operation, the system can receive a design layout. The system may also receive weighting factors that are associated with the particle densities in the metal regions and the empty regions. Next, the system can determine local critical-area-ratios and optimization potentials for a set of wire-segments. The system can then select a wire segment, and compare its local critical-area-ratio with a global critical-area-ratio. Next, the system can use the result of the comparison to determine a layout optimization. The system can then apply the layout optimization to the wire segment to obtain an improved layout.
Claims21
A method to reduce random yield loss, the method comprising:
- determining a local critical-area-ratio for a wire segment in a layout;
- comparing the local critical-area-ratio with a global critical-area-ratio;
- using the result of the comparison to determine a layout optimization;
- and
- applying the layout optimization to the wire segment to obtain an improved layout.
A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method to reduce random yield loss, the method comprising:
- determining a local critical-area-ratio for a wire segment in a layout;
- comparing the local critical-area-ratio with a global critical-area-ratio;
- using the result of the comparison to determine a layout optimization;
- and
- applying the layout optimization to the wire segment to obtain an improved layout.
An apparatus to reduce random yield loss, the apparatus comprising:
- a first determining mechanism configured to determine a local critical-area-ratio for a wire segment in a layout;
- a comparing mechanism configured to compare the local critical-area-ratio with a global critical-area-ratio;
- a second determining mechanism configured to use the result of the comparison to determine a layout optimization;
- and
- an applying mechanism configured to apply the layout optimization to the wire segment to obtain an improved layout.
Dependencies are inferred from the claim text.