Process fault analyzer and system, program and method thereof

A program for causing a computer to work as:

• a process characteristic quantity integration unit which integrates process characteristic quantity data for respective manufacturing devices calculated from process data of a plurality of manufacturing devices, and generates integrated process characteristic quantity data;
• a fault analysis rule data storing unit which stores a fault analysis rule for performing fault analysis from the integrated process characteristic quantity data;
• a fault determination unit which performs fault analysis from the integrated process characteristic quantity data according to the fault analysis rule;
• and
• an output unit which outputs fault notifying information in a case of being determined as abnormal by the fault determination unit.

A process fault analyzing method to detect fault in a process on an unit object according to process data obtained when the process is performed in a manufacturing system including a plurality of manufacturing devices, comprising the steps of:

• integrating process characteristic quantity data of respective manufacturing devices calculated from process data of the plurality of manufacturing devices, and generating integrated process characteristic quantity data;
• performing fault analysis from the integrated process characteristic quantity data according to a fault analysis rule for performing fault analysis from the integrated process characteristic quantity data;
• and
• outputting fault notifying information in a case of being determined as abnormal by an fault determination unit.