Method for managing tools using statistical process control

A computer-readable storage medium storing a computer program providing a method for managing tools using statistical process control, comprising using a computer to perform the steps of:

• recording process progression for a wafer in a chamber of a process tool;
• when a wafer process is complete and the wafer leaves the chamber, transferring the wafer to a measurement tool;
• obtaining a wafer ID of the wafer using the measurement tool;
• obtaining a chamber ID according to the wafer ID and generating a chart point corresponding to the wafer ID and the chamber ID according to measurement results;
• grouping a plurality of generated chart points according to a plurality of obtained wafer IDs and a plurality of chamber IDs corresponding to the wafer IDs to split a control chart corresponding to the process tool into a plurality of separate control charts;
• and
• implementing statistical process control analysis according to the generated control charts and issuing alarms according to the analysis results to adjust an abnormal chamber.