Norbornenylmethyl fluoroalkyl ethers
OwnerBrian Kipp, Lee Spragueinventors
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Abstract
New monomers, norbornenylmethyl fluoroalkyl ethers, made by reaction of bicyclo(2,2,1)hept-5-ene-2-methanol with fluoro(alkyl vinyl ethers), are described. These monomers are useful in making polymers such as hydrophobic, hydrolytically-resistant polymers for photoresists, particularly for use in photoimaging by immersion lithography with 193 nm light.
Claims9
R—CH2—O—C2FaHb—O—CxFyHzOn where R is bicyclo[2.2.1]hept-2-enyl and is bonded to the methylene group at the 5-position;
- a=1 to 3 and b=1 to 3, a+b=4;
- x=1 to 10, y=0 to 2x+1, z=0 to 2x+1, y+z=2x−1 or 2x+1;
- and n=0 to 8with the proviso that the oxygen is ether oxygen.
R—CH2—O—C2F4—O—CxFyOn where R is bicyclo[2.2.1]hept-2-enyl and is bonded to the methylene group at the 5-position;
- x=1 to 10, y=2x−1 or 2x+1;
- and n=0 to 8 with the proviso that the oxygen is ether oxygen.
5-[(1,1,2,4,4,5,5,6,6,6-decafluoro-3-oxahexoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
5-[(1,1,2,4,4,5,5,5-octafluoro-3-oxapentoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
5-[(1,1,2,4,4,4-hexafluoro-3-oxabutoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
Polymerized R—CH2—O—C2FaHb—O—CxFyHzOn where R is bicyclo[2.2.1]hept-2-enyl and is bonded to the methylene group at the 5-position;
- a=1 to 3 and b=1 to 3, a+b=4;
- x=1 to 10, y=0 to 2x+1, z=0 to 2x+1, y+z=2x−1 or 2x+1;
- and n=0 to 8 with the proviso that the oxygen is ether oxygen.
Polymerized 5-[(1,1,2,4,4,5,5,6,6,6-decafluoro-3-oxahexoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
Polymerized 5-[(1,1,2,4,4,5,5,5-octafluoro-3-oxapentoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
Polymerized 5-[(1,1,2,4,4,4-hexafluoro-3-oxabutoxy)methyl]-bicyclo[2.2.1]hept-2-ene.
Dependencies are inferred from the claim text.