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US 2007/0190796 A1Published application
Method and apparatus for manufacturing a functional layer consisting of at least two components
AssigneeOTB Group B.V.
InventorsMartin Bijker, Franciscus Dings, Marinus Evers
Life of this patent
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Abstract
A method for manufacturing a functional layer includes introducing a substrate into a process chamber; generating a plasma by a DC plasma cascade source; depositing a first deposition material on the substrate under the influence of the plasma. At the same time, a second deposition material is applied to the substrate with a second deposition process. The functional layer has no catalytic function.
Claims35
A method for manufacturing a functional layer, comprising:
- introducing a substrate into a process chamber,
- generating a plasma by a DC plasma cascade source;
- depositing a first deposition material on the substrate under the influence of the plasma, wherein, at the same time, applying a second deposition material to the substrate with a second deposition process, wherein the functional layer has no catalytic function.
An apparatus for manufacturing a functional layer on a substrate, comprising:
- a process chamber:
- a DC plasma cascade source configured to generate a plasma;
- a first deposition material source configured to introduce a first deposition material into the plasma;
- a substrate positioning device configured to bring and/or keep at least a part of a substrate in such a position in the process chamber that the substrate contacts said plasma;
- a second deposition material source, configured to deposit a second deposition material on the substrate at the same time as the plasma source, wherein the functional layer is no catalytically active layer.
2 more elements
Dependencies are inferred from the claim text.