Site-selectively modified micro-and nanostructures and the methods of their fabrication
AssigneeHitachi, Ltd.
InventorsKenji Murao, Kosuke Kuwabara, Masahiko Ogino
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi, Ltd.
InventorsKenji Murao, Kosuke Kuwabara, Masahiko Ogino
Estimating the term…
It is an object of the present invention to provide a method which can easily and selectively modify specific sites on indentations or protrusions of indentation/protrusion structures fabricated by nano-imprinting. Pressing a mold having indentation/protrusion structures onto a polymer substrate comprising at least two layers of different chemical composition exposes the second layer, which has been covered by the outermost layer, in pillars formed as a result of the pressing. Site-specific chemical modification of the pillars can be achieved by formulating a desired chemical composition for the second layer beforehand, or by chemical modification of the exposed second layer cross-sections in the pillars.
A method for producing a micro- and nano-structure, comprising the steps of:
A method for producing a micro- and nano-structures, comprising the steps of:
Micro- and nano-structures which have indentation/protrusion structures on a surface of a substrate, wherein the protrusions or indentations have at least two layer structure, cross-sections of which are exposed to the outside, and the outermost layer of the layered structure and at least one layer below the outermost layer have different chemical or physical properties from each other.
Dependencies are inferred from the claim text.