Method of fabricating a semiconductor device

Abstract

According to the invention, the method comprises the steps of: fabricating a first conductive layer including a first contact pad and covering the first conductive layer with a first protection layer at least on top of the first contact pad such that a first protective cap is formed thereon; fabricating a second conductive layer including a second contact pad, wherein the second conductive layer and the first conductive layer are electrically insulated from one another, and covering the second conductive layer with a second protection layer at least on top of the second contact pad such that a second protective cap is formed thereon; depositing at least one intermediate layer on top of the structure; forming a mask on top of the intermediate layer and etching the intermediate layer thereby exposing the first protective cap and the second protective cap, wherein an etchant is applied that provides a larger etch rate with regard to the intermediate layer than with regard to the protective layer; and after exposing the first and second protective caps, etching them and exposing the first and second contact pad during the same etch step.

Dependencies are inferred from the claim text.