Systems and methods of controlling systems
OwnerChao Su, Jen-Feng Yao +1inventors
InventorsChao Su, Jen-Feng Yao, Yang Fan
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Abstract
A system comprises at least one semiconductor fabrication process apparatus with a fan for providing a downflow. A sensor is disposed on or in a conduit that is fluidly coupled to the semiconductor fabrication process apparatus for releasing an exhaust fluid of a process. The sensor is capable of detecting a characteristic of the exhaust fluid flowing within the conduit and producing a signal indicating the characteristic. A processor is coupled to the sensor. A venting apparatus is coupled to the processor. The processor compares the characteristic of the exhaust fluid with at least one predetermined value to control the venting apparatus.
Claims20
A system, comprising:
- at least one semiconductor fabrication process apparatus with a fan for providing a downflow;
- a sensor disposed on or in a conduit that is fluidly coupled to the semiconductor fabrication process apparatus for releasing an exhaust fluid of a process, the sensor being capable of detecting a characteristic of the exhaust fluid flowing within the conduit and producing a signal indicating the characteristic;
- a processor coupled to the sensor;
- and
- a venting apparatus coupled to the processor, wherein the processor compares the characteristic of the exhaust fluid with at least one predetermined value to control the venting apparatus.
A system, comprising:
- at least one semiconductor fabrication process apparatus with a filter/fan unit;
- a sensor disposed on an exhaust conduit which is fluidly coupled to the semiconductor fabrication process apparatus for releasing an exhaust fluid of a process, the sensor detecting a characteristic of the exhaust fluid flowing within the conduit;
- a damper disposed on the exhaust conduit;
- a processor coupled to the sensor and the damper, the processor comparing the characteristic of the exhaust fluid with a predetermined value to control the venting apparatus;
- and
- an exhauster attached to the exhaust conduit adjacent to the damper.
A method of controlling a system, comprising the steps of:
- (a) providing a downflow in a semiconductor fabrication equipment;
- (b) sensing at least one characteristic of an exhaust fluid in a conduit, the exhaust fluid including fluid from the downflow;
- (c) generating a signal when the characteristic of the exhaust fluid falls outside a predetermined value;
- and
- (d) controlling the exhaust fluid based on the signal, so that the characteristic of the exhaust fluid substantially falls within the predetermined value.
Dependencies are inferred from the claim text.