Negative radiation-sensitive resin composition
AssigneeJsr Corporation
InventorsKouji Nishikawa, Tooru Kimura, Shin-ichiro Iwanaga
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AssigneeJsr Corporation
InventorsKouji Nishikawa, Tooru Kimura, Shin-ichiro Iwanaga
Estimating the term…
It is an object of the present invention to provide a process capable of precisely producing a plated shaped article of a large thickness such as a bump or a wiring, a negative radiation-sensitive resin composition which is preferably used for the process and has excellent sensitivity and resolution, and a transfer film using the composition. The above object is achieved by a negative radiation-sensitive resin composition comprising (A) a polymer containing structural units represented by the following formula (1) and/or the following formula (2), (B) a compound having at least one ethylenically unsaturated double bond and (C) a radiation-sensitive radical polymerization initiator, and by forming a negative radiation-sensitive resin film using the composition.
A negative radiation-sensitive resin composition comprising:
Dependencies are inferred from the claim text.