Inorganic film/substrate composite material with high transparency and method of manufacturing the same
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsJun Akedo, Masakazu Mori
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Abstract
A novel inorganic film/substrate composite material is formed having an improved transparency. A method for producing the same is also provided. An inorganic film/substrate composite material whose inorganic film has been formed by aerosol deposition (AD method), in which fine particles of an inorganic brittle material 0.2 to 2 μm or less in size that contain few fine particles 0.15 μm or less in size are sprayed on a substrate, characterized in that the transmittance of the inorganic film is 85% or higher in the visible light region.
Claims16
An inorganic film/substrate composite material, wherein the inorganic film is formed by aerosol deposition (AD method), in which an aerosol of fine particles of an inorganic brittle material 0.2 to 2 μm in size that contains few fine particles 0.15 μm or less in size is sprayed on a substrate, and has a transmittance of 85% or higher in the visible light region.
A method for producing an inorganic film/substrate composite material, wherein a film composed of fine particles of an inorganic brittle material is formed on a substrate by spraying onto the substrate an aerosol of the fine particles of the inorganic brittle material dispersed in a gas from the tip of a nozzle at about a subsonic speed to the speed of sound in a chamber under low vacuum of 1 kPa or less, and wherein the temperature of the aerosol sprayed from the tip of the nozzle is controlled so that it is higher than room temperature.
Dependencies are inferred from the claim text.