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US 2007/0190247 A1Published application
Method for forming organic light-emitting layer
AssigneeMecharonics Co., Ltd.
InventorsHyuk-Kyoo Jang, Hyun-Chang Kim
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Abstract
Disclosed herein is a method for forming a light-emitting layer on an industrial scale via chemical vapor deposition or molecular layer deposition. According to the method, a metal-containing material and an 8-hydroxyquinoline derivative having stable vapor pressure characteristics are used as raw materials and are vaporized.
Claims26
A method for forming a light-emitting layer by atomic or molecular layer deposition, comprising the steps of:
- 1) placing a substrate in a reaction chamber and maintaining the inner temperature of the reaction chamber at a specific reaction temperature;
- 2) feeding a metal-containing material into the reaction chamber and reacting the material with the substrate;
- and
- 3) feeding an 8-hydroxyquinoline derivative into the reaction chamber and reacting the raw materials.
1 more element
A method for forming a light-emitting layer by chemical vapor deposition, comprising the steps of:
- 1) placing a substrate in a reaction chamber and maintaining the inner temperature of the reaction chamber at a specific reaction temperature;
- and
- 2) simultaneously feeding a metal-containing material and an 8-hydroxyquinoline derivative into the reaction chamber with or without carrier gas and reacting the raw materials.
Dependencies are inferred from the claim text.