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US 2007/0190232 A1Published application
Method and system for characterizing porous materials
AssigneeTokyo Electron Limited
InventorsJianhong Zhu, Dorel Toma
Life of this patent
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Abstract
A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.
Claims21
1-25. (canceled)
A method of characterizing a material comprising:
- performing a sealing process on a surface of a porous dielectric film;
- exposing said sealed surface of said porous dielectric film to a treating agent, which permeates through said sealed surface and disperses within said porous dielectric film;
- and
- monitoring a release of said treating agent dispersed within said porous dielectric film through said sealed surface of said porous dielectric film to determine an effectiveness of said sealing process.
1 more element
A method of characterizing a material comprising:
- performing a sealing process on a surface of a porous dielectric film;
- exposing said sealed surface of said porous dielectric film to a treating agent, wherein said treating agent is liquid immersion treatment, vapor phase treatment, supercritical fluid, or any combination thereof, said treating agent configured to permeate through said sealed surface and disperse within said porous dielectric film;
- and
- monitoring a release of said treating agent dispersed within said porous dielectric film through said sealed surface of said porous dielectric film to determine an effectiveness of said sealing process.
1 more element
Dependencies are inferred from the claim text.