Exposure apparatus and device manufacturing method

An exposure apparatus for exposing a substrate to a pattern, said apparatus comprising:

• an update system to update a parameter necessary for processing in said exposure apparatus through measurement;
• a setting system to set a validity period of the parameter updated by said update system;
• and
• a control system to cause said update system to update the parameter,
• wherein, prior to execution of a unit of the processing, said control system determines that said update system is to update the parameter if a predicted completion time of the unit is after expiration of the validity period.

A control method for an exposure apparatus for exposing a substrate to a pattern, said method comprising steps of:

• updating a parameter necessary for processing in the exposure apparatus through measurement;
• setting a validity period of the parameter updated in said updating step;
• and
• causing said updating step to update the parameter,
• wherein, prior to execution of a unit of the processing, said causing step determines that said updating step is to update the parameter if a predicted completion time of the unit is after expiration of the validity period.

An exposure apparatus for exposing a substrate to a pattern, said apparatus comprising:

• update means for updating a parameter necessary for processing in said exposure apparatus through measurement;
• setting means for setting a validity period of the parameter updated by said update means;
• and
• control means for causing said update means to update the parameter,
• wherein, prior to execution of a unit of the processing, said control means determines that said update means is to update the parameter if a predicted completion time of the unit is after expiration of the validity period.

An exposure apparatus for exposing a substrate to a pattern, said apparatus being configured to:

• update a parameter necessary for processing in said exposure apparatus through measurement;
• set a validity period of the updated parameter;
• and
• cause the updating to be performed based on the validity period,
• wherein, prior to execution of a unit of the processing, it is determined that the updating is to be caused to be performed if a predicted completion time of the unit is after expiration of the validity period.