Synthesis of Photresist Polymers

A method of free radical polymerization to form a polymer comprising the formula:

• wherein R1 represents a hydrogen atom or a methyl group, each R2, individually, represents a linear or branched, non-substituted or substituted, alkyl group having 1-4 carbon atoms or a bridged or non-bridged, non-substituted or substituted, monovalent alicyclic hydrocarbon group having 4-20 carbon atoms, provided that at least one R2 group is a linear or branched alkyl group having 1-4 carbon atoms, or any two R2 groups form, in combination and together with the carbon atoms to which the two R1 groups bond, a bridged or non-bridged, non-substituted or substituted, divalent alicyclic hydrocarbon group having 4-20 carbon atoms, with the remaining R2 groups being a linear or branched, non-substituted or substituted, alkyl group having 1-4 carbon atoms or —C(R2)3, is one
• wherein the polymer is prepared by a living free radical process (LFRP) in the presence of a chain transfer agent (CTA) having the formula
• wherein Rx is a group that is sufficiently labile to be expelled as its free radical form, T is carbon or phosphorus, and Z is any group that activates the C═S double bond towards a reversible free radical addition fragmentation reaction.