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AssigneesKorea Basic Science Institute, Sem Technology Co., Ltd.
InventorsHag-Joo Lee, Bong-Ju Lee
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There is provided a method for producing a solid element plasma from a solid lump and a plasma source used in the method. The method of the present invention comprises colliding a solid lump with accelerated particles or lasers to detach solid atoms from the solid lump within a first chamber inside which sputtering of solid atoms is performed, directing the solid atoms to a second chamber inside which plasma discharge is performed, applying a voltage to the second chamber to produce a plasma of solid atoms through plasma discharge, and contacting the plasma of solid atoms to a target to be treated. The present invention avoids problems caused from impurities and poisonous gases of conventional systems adopting a solid element-containing gas as a source of solid element.
A method for producing a solid element plasma, comprising colliding a solid lump with accelerated particles or lasers to detach solid atoms from the solid lump within a first chamber inside which sputtering of solid atoms is performed, directing the solid atoms to a second chamber inside which plasma discharge is performed, applying a voltage to the second chamber to produce a plasma of solid atoms through plasma discharge, and contacting the plasma of solid atoms to a target to be treated.
A solid element plasma source comprising a first chamber inside which sputtering of solid atoms is performed by collision of a solid lump with accelerated particles or lasers followed by detachment of solid atoms from the solid lump, a second chamber inside which plasma discharge is performed by application of a voltage that initiates plasma discharge of the sputtered solid atoms, and a transporting member which provides a passage of the sputtered solid atoms from the first chamber to the second chamber.
A solid element plasma source, comprising:
Dependencies are inferred from the claim text.