Stressed-channel CMOS transistors

Abstract

Methods for forming portions of source and drain (S/D) regions of a first ensuing transistor (40) to include a semiconductor material (47) having a different composition of non-dopant elements than portions of S/D regions (35) of a second ensuing transistor (30) of opposite conductivity type are provided. The methods additionally include forming another semiconductor material (48) upon at least one set of the S/D regions of the ensuing transistors such that S/D surface layers of the ensuing transistors include substantially the same composition of non-dopant elements. A resulting semiconductor topography includes a pair of CMOS transistors (30, 40) collectively having S/D region surfaces with substantially the same composition of non-dopant elements. The S/D regions of one transistor (40) of the pair of CMOS transistors includes an underlying layer (47) having a different composition of non-dopant elements than underlying layers of the S/D regions (35) of the other transistor (30).

Dependencies are inferred from the claim text.