Method for producing carbon nanowalls, carbon nanowall, and apparatus for producing carbon nanowalls

A method for producing carbon nanowalls comprising:

• creating a plasma atmosphere in at least one region of a reaction chamber by plasmatizing a source material containing carbon;
• introducing radicals generated outside the plasma atmosphere into the plasma atmosphere;
• and
• growing carbon nanowalls on a base material disposed in the reaction chamber.

A parallel plate-type plasma-processing apparatus comprising a first electrode, having a large number of perforations, for applying an electric power;

• a second electrode which is opposed to the first electrode, which is parallel to the first electrode, and on which a workpiece is set;
• a reaction region to which gas is fed, which is located between the first and second electrodes, and in which a plasma is generated;
• a high-frequency power supply for applying high-frequency waves to a region between the first and second electrodes to plasmatize the gas;
• a radical-generating region which is spaced from the second electrode with the first electrode disposed therebetween and to which a radical source is fed;
• a radical generator for generating radicals from the radical source in the radical-generating region;
• a shield member which is disposed between the first electrode and the radical-generating region, which partitions the radical-generating region, which has a large number of perforations that are aligned with the perforations of the first electrode such that the radicals pass through these perforations, and which is grounded, wherein the radicals generated by the radical generator are introduced into the reaction region through the perforations of the shield member and the perforations of the first electrode.