Vacuum pump
AssigneeEdwards Limited
InventorsRoland Gregor Paul Kusay, Clive Tunna
Life of this patent
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Abstract
A method of inhibiting combustion within a vacuum pump is provided. The method steps include monitoring and composition of a fluid within the pump and supplying purge gas to the pump to inhibit the onset of a combustion of the fluid. There is also provided a pumping arrangement comprising a vacuum pump (1) together with means (8) for supplying purge gas to the pump. Sensor means (21a, 21b, 21c) are provided for outputting a signal indicative of the onset of a combustion condition within the pump. Control means (22) receive the signal and, in turn, actuate the supply means (9) dependant on the signal received.
Claims52
A method of inhibiting combustion within a vacuum pumping arrangement, the method comprising the steps of:
- monitoring the composition of a fluid within the pumping arrangement;
- and
- depending on the monitored composition, inhibiting the escalation of a combustion condition within the pumping arrangement.
A method of inhibiting combustion within a vacuum pump of a pumping arrangement, the method comprising the steps of:
- monitoring the composition of a fluid within the pumping arrangement;
- and
- depending on the monitored composition, supplying gas to the pumping arrangement to inhibit the onset of a combustion condition within the pump.
A pumping arrangement comprising a vacuum pump:
- means for monitoring the composition of a fluid within the pumping arrangement;
- means for inhibiting the escalation of a combustion condition within the pumping arrangement;
- and
- control means for receiving a signal from the monitoring means and for actuating the inhibiting means dependant on the signal.
A pumping arrangement comprising a vacuum pump;
- means for supplying gas to the pumping arrangement;
- means for outputting a signal indicative of the onset of a combustion condition within the pumping arrangement;
- and control means for receiving the signal and for actuating the supply means dependant on the signal.
Dependencies are inferred from the claim text.