Docking station for a factory interface

Abstract

An apparatus for docking a substrate storage pod to a factory interface is provided. In one embodiment, an apparatus for docking a substrate storage pod to a factory interface includes a docking station having a substantially horizontal flange extending from a substantially vertical wall. The wall has an aperture formed therethrough. A stage is movably coupled to the flange and adapted to support the substrate storage pod. An engagement mechanism and docking actuator are coupled to the stage. The engagement mechanism is adapted to secure the substrate storage pod to the stage. The docking actuator is adapted to move substrate storage cassette against the bay. A release mechanism is adapted to decouple at least one of the engagement mechanism from the pod or the stage from the docking actuator, thereby facilitating access to the pod in the event of one or more of the actuators becoming immobilized.

Dependencies are inferred from the claim text.