Method and storage medium for replacing process instrument in processing apparatus

A method for replacing a process instrument in a processing apparatus, in which a target object from a carry-in section is sequentially loaded by transfer means into some of a plurality of processing units to perform a process thereon, and the target object thus processed is unloaded by the transfer means to a carry-out section, wherein the processing units comprise a processing unit that includes a process instrument and is configured to perform a process on the target object by use of the process instrument, the method comprising:

• setting an appointment for a process instrument replacement target;
• setting takeoff suspension of a next lot from the carry-in section, in response to the appointment being set, before staring a process instrument replacing operation;
• confirming that a process on the target object is finished in a processing unit designated as the process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start;
• when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer means, canceling the operation prohibition state to allow the transfer means to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target;
• and
• canceling the takeoff suspension of the next lot from the carry-in section, in response to a process instrument replacing operation being finished.

A method for replacing a process instrument in a processing apparatus, in which a target object from a carry-in section is sequentially loaded by transfer means into some of a plurality of processing units to perform a process thereon., and the target object thus processed is unloaded by the transfer means to a carry-out section, wherein the processing units comprise processing units of the same type that includes a process instrument and is configured to perform a process on the target object by use of the process instrument, the method comprising:

• setting an appointment for a process instrument replacement target;
• confirming that a process instrument in one of the processing units of the same type is to be replaced, and changing a transfer schedule for transferring the target object, preset prior to the appointment, into a transfer schedule arranged to avoid use of a processing unit designated as the process instrument replacement target;
• confirming that a process on the target object is finished in the processing unit designated as the process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start;
• and,
• when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer means, canceling the operation prohibition state to allow the transfer means to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

A storage medium that stores a program for execution on a computer to replace a process instrument in a processing apparatus, in which a target object from a carry-in section is sequentially loaded by transfer means into some of a plurality of processing units to perform a process thereon, and the target object thus processed is unloaded by the transfer means to a carry-out section, wherein the processing units comprise a processing unit that includes a process instrument and is configured to perform a process on the target object by use of the process instrument, and wherein the program causes the computer to execute:

• setting an appointment for a process instrument replacement target;
• setting takeoff suspension of a next lot from the carry-in section, in response to the appointment being set, before staring a process instrument replacing operation;
• confirming that a process on the target object is finished in a processing unit designated as the process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start;
• when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer means, canceling the operation prohibition state to allow the transfer means to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target;
• and
• canceling the takeoff suspension of the next lot from the carry-in section, in response to a process instrument replacing operation being finished.

A storage medium that stores a program for execution on a computer to replace a process instrument in a processing apparatus, in which a target object from a carry-in section is sequentially loaded by transfer means into some of a plurality of processing units to perform a process thereon, and the target object thus processed is unloaded by the transfer means to a carry-out section, wherein the processing units comprise processing units of the same type that includes a process instrument and is configured to perform a process on the target object by use of the process instrument, and wherein the program causes the computer to execute:

• setting an appointment for a process instrument replacement target;
• confirming that a process instrument in one of the processing units of the same type is to be replaced, and changing a transfer schedule for transferring the target object, preset prior to the appointment, into a transfer schedule arranged to avoid use of a processing unit designated as the process instrument replacement target;
• confirming that a process on the target object is finished in the processing unit designated as the process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start;
• and,
• when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer means, canceling the operation prohibition state to allow the transfer means to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.