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US 2007/0183731 A1Published application
Optical waveguide device and fabricating method thereof
AssigneeNEC Corporation
InventorTaro Kaneko
Life of this patent
Estimating the term…
Abstract
Optical waveguide device has waveguide strip-shaped in the depth direction of the drawing and protruding from peripheral portion. A core (not illustrated) is disposed inside waveguide. Wall to be cut is integrated with waveguide to form one core layer. No unevenness occurs in a cutting line of wall indicated with broken line. Accordingly, high-precision cutting is enabled by cutting wall along the cutting line.
Claims18
An optical waveguide device, comprising:
- a core for propagating light;
- and
- a unitary member having a predetermined width to be cut in its lengthwise direction, said member being connected with said core at a predetermined angle, and a height of said member being constant at a position where said member is connected with said core.
A method of fabricating an optical waveguide device, comprising the steps of:
- forming a cladding on a substrate;
- forming a core layer of a flat plate shape on said cladding;
- removing said core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being constant at a position where said member is connected with said core, while said predetermined shape excluding said core and said member;
- and
- cutting said member in said lengthwise direction.
2 more elements
A method of fabricating an optical waveguide device, comprising the steps of:
- forming a cladding on a substrate;
- forming a first core layer of a flat plate shape on said cladding;
- forming a second core layer on said first core layer;
- removing said second core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being constant at a position where said member is connected with said core, while said predetermined shape excluding said core and said member;
- and
- cutting said member in said lengthwise direction.
3 more elements
Dependencies are inferred from the claim text.