Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
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Abstract
A holding apparatus (38) for holding an optical element (37) at a controlled position and attitude. The optical element (37) is held at an inner ring (43) by a piezo housing (54). A piezo element (65) is isolated from the optical element (37). When the piezo element (65) elongates and contracts, a displacement section (70) is displaced in a plane perpendicular to the optical axis of the optical element while being guided by a parallel link section (71). A transmission link section (72) converts the direction of the displacement of the optical element (37) to transmit the result to a part of the inner ring (43).
Claims24
An optical element holding device for holding an optical element, the optical element holding device comprising:
- a frame member;
- a holding member, arranged in the frame member and configured to hold the optical element;
- a displacement portion configured to be displaced in a direction intersecting with an optical axis of the optical element by a driving force applied from outside the frame member;
- and
- a transmission portion configured to transmit displacement of the displacement portion to the holding member, wherein the transmission portion displaces the holding member in a direction substantially parallel to the optical axis of the optical element.
Dependencies are inferred from the claim text.