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AssigneeMKS Instruments, Inc.
InventorsLeonard Kamlet, Martin Spartz, Peter Rosenthal
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A modular system for gas analysis has a first gas cell that receives and passes at least a portion of an infrared light beam through at least a portion of the first gas cell. A second gas cell disposed proximal to the first gas cell receives and passes at least a portion of the infrared light beam from the first gas cell through at least a portion of the second gas cell. At least a portion of the first gas cell and at least a portion of the second gas cell define a light path having an effective length. The system includes a means for adjusting the effective length of the light path to vary a property of the infrared light beam. Methods of making a variable effective length light path and methods of making a gas detector are also disclosed.
A modular system for gas analysis, the system comprising:
A modular system for gas analysis, the system comprising:
A system for gas analysis, the system comprising:
A method of making a light path having a variable effective length, the method comprising:
A method of making a detector, the method comprising:
A system for gas analysis, the system comprising:
Dependencies are inferred from the claim text.