Substrate defect inspection method, computer readable storage medium, and defect inspection apparatus

A computer readable storage medium storing a program for causing a computer to execute a substrate defect inspection method,

• said defect inspection method comprising the steps of:
• obtaining a difference image between an image of a normal substrate and an image of an inspection object;
• rotating the difference image 360 degrees by every predetermined angle about a center of the substrate, and synthesizing the difference image before the rotation and the difference image after the rotation so that each pixel value of the image after the synthesis is increased;
• digitizing using a Zernike polynomial the image obtained by the synthesis;
• and
• determining the presence or absence of a defect on the substrate based on a Zernike value of a concentric circle component out of Zernike values digitized by the Zernike polynomial.

A defect inspection apparatus for inspecting a substrate for a defect, comprising:

• a stage mounting the substrate thereon and movable in an X-direction and a Y-direction:
• an image pickup unit for picking up an image of the substrate on said stage;
• a difference calculation unit for calculating an absolute value of a difference between image data obtained by said image pickup unit and previously stored image data on a normal substrate, and outputting data on a difference image based on the difference absolute value;
• a synthesis calculation unit for rotating the difference image obtained by said difference calculation unit about a center of the substrate, and synthesizing the rotated difference images to obtain a synthesized image;
• a Zernike calculation unit for digitizing the synthesized image obtained by said synthesis calculation unit by a Zernike polynomial;
• and
• a determination unit for comparing data outputted from said Zernike calculation unit with a previously set threshold value.