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US 2007/0182437 A1Published application
Test handler and operation method thereof
AssigneeTechwing Co., Ltd.
InventorsJae-Gyun Shim, Yun-Sung Na, In-Gu Jeon, Tae-Hung Ku, Dong-Han Kim
Life of this patent
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Abstract
A test handler is disclosed. A posture changing unit for changing a posture of a test tray on which semiconductor devices have been loaded changes the posture of the test tray in a soak chamber. While the posture of the test tray is changed, the devices can be pre-heated/pre-cooled, thereby reducing the soak chamber length and the pre-heating/pre-cooling time.
Claims9
A test handler, comprising:
- a loading unit for loading devices loaded on user trays onto a test tray;
- a posture changing unit for changing a posture of the test tray on which the devices have been loaded by the loading unit;
- a soak chamber for sequentially receiving the test trays posture-changed by the posture changing unit;
- a test chamber in which the devices loaded on the test tray supplied from the soak chamber are tested by a tester;
- a temperature controller for pre-heating/pre-cooling the devices loaded on the test tray before supplying the test tray to the test chamber;
- and
- an unloading unit for unloading the devices test-completed in the test chamber the user trays,
- wherein the temperature controller continuously pre-heats/pre-cools the devices on the test tray while the test tray is posture-changed by the posture changing unit and received in the soak chamber.
5 more elements
An operation method of a test handler, comprising:
- a loading step of loading devices of a user tray onto a test tray;
- a posture changing step of changing a posture of the test tray with pre-heating/pre-cooling the devices on the test tray after completing the loading step;
- a translation step of translating the test tray posture-changed in the posture changing step with continuously pre-heating/pre-cooling the devices on the test tray;
- a test step of testing the devices pre-heated/pre-cooled in the posture changing step and the translation step;
- and
- an unloading step of unloading the devices test-completed in the test step from the test tray to the user trays.
3 more elements
Dependencies are inferred from the claim text.