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US 2007/0182431 A1Published application
Probe card and probe device
AssigneeTokyo Electron Limited
InventorsShigekazu Komatsu, Takashi Amemiya, Jun Mochizuki
Life of this patent
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Abstract
The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.
Claims10
A probe card, comprising:
- a connector to be electrically connected with a tester which supplies a signal to a semiconductor device for inspection;
- a substrate having a plurality of probes to be contacted with electrode pads of said semiconductor device and an electric wiring pattern formed commensurate with said probes;
- and
- a flexible connector to electrically connect said connector and said substrate.
1 more element
A probe device, comprising a probe card,
- said probe card, comprising:
- a connector to be electrically connected with a tester which supplies a signal to a semiconductor device for inspection;
- a substrate having a plurality of probes to be contacted with electrode pads of said semiconductor device and an electric wiring pattern formed commensurate with said probes;
- and
- a flexible connector to electrically connect said connector and said substrate.
2 more elements
Dependencies are inferred from the claim text.