Cantilever Microprobes For Contacting Electronic Components and Methods for Making Such Probes

A cantilever probe for making contact with an electronic circuit element, comprising:

• at least one pivot element which is bonded to a substrate;
• at least one beam element having a first distal end and a second distal end, wherein the second distal end holds a contact tip for making contact to an electronic circuit element, and wherein the at least one beam element contacts the pivot element at a location intermediate to the first and second distal ends;
• a compliant element that functionally connects the substrate to the beam element on a lateral side of the beam element that is opposite to the lateral side of the beam, relative to the pivot element, that holds the contact tip;
• wherein the compliant element experiences a net tension force as the contact tip is pressed against a target surface.