Manufacturing method of electrode for atmospheric pressure plasma, electrode structure, and atmospheric pressure plasma apparatus using the same
AssigneeK.C. Tech Co., Ltd.
InventorsTae Wook KIM, Kyung Ryu
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Abstract
Disclosed are a method of manufacturing an electrode for generating plasma, which is capable of improving durability of the electrode and reducing production costs of the electrode, an electrode structure, and an atmospheric pressure plasma apparatus using the same. The plasma electrode structure comprises a pair of electrodes isolated from each other, a plasma generating space formed between the pair of electrodes, and an oxide coating layer formed uniformly on at least one of surfaces of the pair of electrodes.
Claims12
A plasma electrode structure comprising:
- a pair of electrodes isolated from each other;
- a plasma generating space formed between the pair of electrodes;
- and
- an oxide coating layer formed uniformly on a surface of at least one of the electrodes.
An atmospheric pressure plasma apparatus comprising:
- a plasma electrode structure including a pair of electrodes isolated from each other and an oxide coating layer formed uniformly on a surface of at least one of the pair of electrodes,
- wherein a gas introduced into a plasma generating space formed between the pair of electrodes is plasma-discharged, and gas ions generated by the plasma discharging are jetted on an object to be treated.
A method of manufacturing an electrode for atmospheric pressure plasma, wherein the electrode is formed using metal, and an oxide coating layer is uniformly formed on the entire surface of the electrode.
Dependencies are inferred from the claim text.