Back to results
US 2007/0182291 A1Published application
Thin film tuning-fork type inflection resonator and electric signal processing element
AssigneeHitachi, Ltd.
InventorsAtsushi Isobe, Nobuhiko Shibagaki, Kengo Asai, Hisanori Matsumoto
Life of this patent
Estimating the term…
Abstract
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
Claims18
A thin film tuning-fork type inflection resonator, comprising:
- a piezoelectric film formed in a tuning-fork shape;
- a first metallic electrode formed on a first surface of said piezoelectric film;
- and
- a second metallic electrode formed on a second surface of said piezoelectric film opposite said first surface of said piezoelectric film;
- wherein said first metallic electrode is deposited as a film on said piezoelectric film;
- and
- wherein said piezoelectric film is formed so as to cover said second metallic electrode.
4 more elements
A resonator manufacturing method comprising the steps of:
- forming a lower electrode above a substrate by depositing and etching a material film of said lower electrode;
- forming a piezoelectric thin film on said lower electrode in a tuning fork shape, by depositing and etching said piezoelectric thin film to form said tuning fork shape;
- and
- forming an upper electrode on said piezoelectric thin film by depositing and etching a material film of said upper electrode.
1 more element
A tuning-fork type inflection resonator comprising:
- a piezoelectric element formed into a tuning fork shape;
- a first electrode formed on a first side of the piezoelectric element and connected to a first terminal;
- a second electrode formed on the first side of the piezoelectric element and connected to a second terminal;
- and
- a third electrode formed on a second side of the piezoelectric element opposite to the first side, wherein the third electrode is a single electrode.
2 more elements
A tuning-fork type inflection resonator comprising:
- a piezoelectric element formed into a tuning fork shape having a vibrating part, a pedestal part, and a supporting part;
- a first electrode formed on a first side of the piezoelectric element;
- and
- a second electrode formed on a second side of the piezoelectric element opposite to the first side,
- wherein said first and second electrodes are formed on root portions of said vibrating part, and there are no first and second electrodes at tip portions of said vibrating part.
2 more elements
Dependencies are inferred from the claim text.