Multi-step microactuator
AssigneesStereo Display, Inc., Angstrom, Inc.
InventorsCheong Seo, Gyoung Cho, Sang Baek
Life of this patent
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Abstract
A multi-step microactuator is provided with the multiple supports in a stepper plate to give multi-step displacement to a controlled object. The microactuator has advantages such that multiple motion can be applied to the controlled object and that the object can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the object can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-step microactuator provides a solution to overcome the difficulties in controlling multi-step motion.
Claims39
A multi-step microactuator comprising:
- a. at least one stepper plate, configured to be rotated to give a displacement to a controlled object, wherein the rotational angle of stepper plate is determined by at least two contact points.
- b. a bottom layer configured to have at least one electrode to control the stepper plate.
The multi-step microactuator of claim 22, wherein the actuation amount of the microactuator is defined by the rotational amounts of the stepper plate constraint by the position and height of the stops under the stepper plate.
Dependencies are inferred from the claim text.