Circuit board structure embedded with semiconductor chips
OwnerShih Ping Hsu, Chung Cheng Lien +1inventors
InventorsShih Ping Hsu, Chung Cheng Lien, Shang Wei Chen
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Abstract
A circuit board structure embedded with semiconductor chips is proposed. A semiconductor chip is received in a cavity of a supporting board. A dielectric layer and a circuit layer are formed on the supporting board and the semiconductor chip. A plurality of hollow conductive vias are formed in the dielectric layer for electrically connecting the circuit layer to the semiconductor chip. By providing the hollow conductive vias of present invention, the separating results of different coefficients of expansion and thermal stress are prevented, and thus electrical function of products is ensured.
Claims12
A circuit board structure embedded with semiconductor chips, the circuit board structure comprising:
- a supporting board having at least a cavity;
- at least a semiconductor chip embedded in the cavity of the supporting board, the semiconductor chip having an active surface having a plurality of the electrode pads;
- a protection layer formed on the active surface of the semiconductor chip, the protection layer having a plurality of openings corresponding to the electrode pads for exposure of the electrode pads of the semiconductor chip;
- a metal layer formed on surfaces of the electrode pads exposed from the openings of the protection layer;
- a dielectric layer formed on the supporting board and the protection layer surface, the dielectric layer having another plurality of openings corresponding to the electrode pads for exposure of the metal layer on the electrode pads of the semiconductor chip;
- and
- a circuit layer formed on the dielectric layer, a plurality of hollow conductive vias being formed in the another openings of the dielectric layer and electrically connected to the circuit layer, allowing the circuit layer to be electrically connected via the hollow conductive vias to the metal layer on the electrode pads of the semiconductor chip.
Dependencies are inferred from the claim text.