Intercalated superlattice compositions and related methods for modulating dielectric property
AssigneeNorthwestern University
InventorsTobin Marks, Antonio Facchetti
Life of this patent
Estimating the term…
Abstract
Compositions, methods of using inorganic moieties for dielectric modulation, and related device structures.
Claims20
A dielectric composition comprising a multi-layered composition, the multi-layered composition comprising periodically alternating layers, the alternating layers comprising (a) one or more layers comprising a silyl or siloxane moiety, (b) one or more layers comprising a π-polarizable moiety, and (c) one or more layers comprising an inorganic moiety comprising one or more main group metals and/or transition metals selected from Zr, Ti, Hf, and Ta.
A method of using an inorganic component to affect a property of a dielectric material, said method comprising:
- providing a dielectric composition comprising a multilayer composition, the multilayer composition comprising periodically alternating layers, the alternating layers comprising (a) one or more layers comprising a silyl or siloxane moiety, and (b) one or more layers comprising a π-polarizable moiety, wherein at least some of the alternating layers are coupled to an adjacent layer by a coupling layer comprising a siloxane matrix;
- and
- intercalating within the multilayer composition one or more inorganic layers, each of the inorganic layers comprising one or more main group metals and/or transition metals selected from Ga, In, Ti, Zr, Hf, and Ta.
A thin film transistor device comprising:
- a substrate;
- a dielectric material deposited on the substrate;
- and
- a semiconductor material deposited on the dielectric material;
- wherein the dielectric material comprises a multilayer composition, the multilayer composition comprising periodicially alternating layers, the alternating layers comprising (a) one or more layers comprising a silyl or siloxane moiety, (b) one or more layers comprising a π-polarizable moiety, and (c) one or more layers comprising an inorganic moiety comprising one or more main group metals and/or transition metals.
Dependencies are inferred from the claim text.