Laser atom probe methods
AssigneeImago Scientific Instruments Corporation
InventorsJoseph Bunton, Jesse Olson
Life of this patent
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Abstract
A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
Claims42
An automated process for aligning an energy beam to a specimen in an atom probe, the atom probe having a specimen mount spaced from a detector, the process comprising the steps of:
- a. sweeping an energy beam in one or more dimensions over a sweep area, the sweep area being on or near the specimen;
- b. during the sweep, monitoring one or more parameters indicative of the interaction between the energy beam and the specimen;
- c. defining a subset of the sweep where the monitored parameters meet predefined alignment criteria;
- d. repeating the process from step a. above after reducing the sweep area, wherein the reduced sweep area encompasses at least the subset of step c.
An automated process for aligning an energy beam to a specimen in an atom probe, the atom probe having a specimen mount spaced from a detector, the process comprising the steps of:
- a. sweeping an energy beam in one or more dimensions over a sweep area, the sweep area being on or near the specimen;
- b. during the sweep, monitoring one or more parameters indicative of the interaction between the energy beam and the specimen;
- c. identifying one or more locations along the sweep at which the monitored parameters meet predefined alignment criteria;
- d. repeating the process from step a. above after:
- (1) reducing the sweep area to encompass at least one of any locations identified in step c.;
- or
- (2) increasing the sweep area if no location is identified in step c.
An automated process for aligning an energy beam to a specimen in an atom probe, the atom probe having a specimen mount spaced from a detector, the process comprising the steps of:
- a. directing an energy beam toward the specimen mount;
- b. sweeping the energy beam in one or more dimensions over a sweep area of predefined size, while monitoring one or more parameters indicative of the interaction between the energy beam and the specimen;
- c. defining a home location along the sweep at which the monitored parameters best meet desired alignment criteria;
- d. repeating the process from step b. above after:
- (1) resizing the sweep area, and
- (2) starting the sweep at or about the home location.
An automated process for aligning an energy beam to a specimen in an atom probe, the atom probe having a specimen mount spaced from a detector, the process comprising the steps of:
- a. sweeping a laser beam in one or more dimensions over a sweep area, the sweep area being on or near the specimen;
- b. monitoring one or more of the following parameters during the sweep:
- (1) the collection rate of any ions detected by the detector;
- (2) the mass resolution of any ions detected by the detector;
- (3) any voltage applied to the specimen mount;
- (4) any reflected portions of the laser beam;
- and
- (5) any scattered portions of the laser beam;
- c. identifying one or more locations along the sweep at which the monitored parameters meet predefined alignment criteria;
- d. repeating the process from step a. above after:
- (1) reducing the sweep area to encompass at least one of any locations identified in step c.;
- or
- (2) increasing the sweep area if no location is identified in step c.
Dependencies are inferred from the claim text.