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US 2007/0181820 A1Published application
Apparatus and method for controlling ion beam
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-Wook Hwang, Do-Haing Lee, Chul-Ho Shin, Jong-Woo Sun
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Abstract
An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.
Claims34
An apparatus for controlling an ion beam, comprising:
- at least one extraction electrode disposed in a path of an ion beam,
- wherein the at least one extraction electrode includes a plurality of sub-grids.
A method for controlling an ion beam, the method comprising:
- applying a potential to at least one extraction electrode disposed in a path of an ion beam, wherein the at least one extraction electrode includes a plurality of sub-grids.
A method for preparing an extraction electrode, the method comprising:
- measuring a distribution of an ion beam,
- forming an extraction electrode having a plurality of sub-grids having a configuration reflecting the distribution of the ion beam.
Dependencies are inferred from the claim text.