Electron microscope and electron bean inspection system.

An inspection system, comprising:

• means for applying an accelerating voltage to an electron source;
• specimen voltage applying means for applying a specimen voltage to a stage for holding said specimen;
• an illuminating lens for illuminating an electron beam emitted from said electron source to said specimen as a planar illuminating electron beam having a two-dimensional extent;
• means for controlling a reflecting plane of said mirror electron beam reflected without coming into collision with said specimen;
• means for converting said mirror electron beam to an image by projecting and magnifying said electron beam, then projecting and focusing said specimen image;
• and
• means for inspecting the specimen from said image.

A mirror electron microscope, comprising:

• an electron source;
• means for illuminating an area beam on a specimen with an illuminating lens system including an electron gun lens for accelerating and focusing an illuminating electron beam emitted from said electron source, a condenser lens, and an objective lens;
• means for magnifying and projecting a mirror electron beam reflected without coming into collision with a specimen with said objective lens, an intermediate lens, and an imaging lens;
• and
• means for separating said mirror electron beam from said illuminating electron beam with a separator;
• wherein said mirror electron microscope further includes means for selecting an energy of said illuminating electron beam with an energy filter disposed near to a cross-over of said illuminating electron beam formed by said electron gun lens.