Method for setting capillary contact position data and wire bonding apparatus using the same
AssigneeKabushiki Kaisha Shinkawa
InventorsKuniyuki Takahashi, Satoshi Enokido
Life of this patent
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Abstract
In wire bonding, a clearance measurement between the capillary and reference member being performed by an image capturing device for capturing elevation images of the used and new (replaced) capillaries and the reference member and by a clearance measuring device that processes the elevation images of the capillaries and the reference member, obtained by the image capturing device, and then measures the distance in a vertical direction between the tip ends of the capillaries and the tip end of the reference member, thus setting post-replacement capillary contact position data based on pre-replacement capillary contact position data and the obtained clearance difference.
Claims5
A method for setting capillary contact position data for a capillary set for a particular contact position, said setting being performed at a time of replacing capillaries in a wire bonding apparatus, said method comprising the steps of:
- obtaining a clearance difference between, in a vertical direction, a reference member and capillaries measured respectively before and after capillary replacement;
- and
- setting post-replacement capillary contact position data based on pre-replacement capillary contact position data and said obtained clearance difference.
A wire bonding apparatus comprising:
- a replaceable capillary set for a particular contact position;
- a reference member provided in a predetermined position;
- an image capturing device for capturing an elevation image including capillaries and said reference member;
- a clearance measuring means for processing said elevation images obtained by said image capturing device to measure a distance in a vertical direction between said tip ends of said capillaries and a tip end of said reference member;
- and
- a capillary contact position data setting means for setting post-replacement capillary contact position data, based on pre-replacement capillary contact position data and a clearance difference between, in said vertical direction, said reference member and said capillaries measured by said clearance measuring means before and after capillary replacement.
Dependencies are inferred from the claim text.