Micro heat flux sensor array
AssigneeSamsung Electronics Co., Ltd.
InventorsJae-Wook Yoo, Yun-Hyeok Im
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Abstract
Provided is a micro heat flux sensor array having reduced heat resistance. A micro heat flux sensor array may include a substrate, a plurality of first sensors formed on a first side of the substrate, and a plurality of second sensors formed on a second side of the substrate. Each of the plurality of first and second sensors may include a first wiring pattern layer of a first conductive material, a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer, and an insulating layer in contact with the first and second wiring patterns.
Claims22
A micro heat flux sensor array, comprising:
- a substrate;
- a plurality of first sensors formed on a first side of the substrate;
- and
- a plurality of second sensors formed on a second side of the substrate, wherein each of the plurality of first and second sensors include,
- a first wiring pattern layer of a first conductive material,
- a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer, and
- an insulating layer, interposed between the first and second wiring pattern layers, having via holes therein through which the first and second wiring pattern layers make contact, respectively.
A micro heat flux sensor array, comprising:
- a substrate;
- a plurality of first sensors formed on a first side of the substrate;
- and
- a plurality of second sensors formed on a second side of the substrate,
- wherein each of the plurality of first and second sensors include,
- a first wiring pattern layer of a first conductive material,
- a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer,
- an insulating layer, interposed between the first and second wiring pattern layers, having via holes therein through which the first and second wiring pattern layers make contact, respectively, and
- a plurality of grooves formed at desired intervals on the insulating layer.
A micro heat flux sensor array, comprising:
- a substrate;
- a plurality of first sensors formed on a first side of the substrate;
- and
- a plurality of second sensors formed on a second side of the substrate,
- wherein each of the plurality of first and second sensors include,
- a first wiring pattern layer of a first conductive material,
- a second wiring pattern layer of a second conductive material contacting the first wiring pattern layer,
- an embossed insulating layer having a plurality of protrusions at desired intervals and in contact with the first and second wiring pattern layers, and
- a plurality of grooves formed between adjacent protrusions on the insulating layer.
Dependencies are inferred from the claim text.