Method and apparatus for controlling sample position during material removal or addition
OwnerJames Boyette, Jeffrey LeClaire +1inventors
InventorsJames Boyette, Jeffrey LeClaire, Roy White
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Abstract
A method and system includes the accurate positioning of a sample in a multi-axis range of motion. In a preferred embodiment, the present invention enables this movement by combining coarse and fine motion stages. By using a combination of stages and precise measuring means, normal and typical errors are significantly reduced.
Claims48
An apparatus for positioning a material in the appropriate location such that the material can be modified with a system, comprising:
- a multi-axis stage configured to accept the material on an outer surface, wherein the multistage axis is configured to translate or rotate along at least one axis;
- and
- a second stage with at least one axis of motion positioned on an opposing surface of the multi-axis stage.
A method for positioning a sample relative to a system such that the sample could be modified, comprising:
- positioning the sample on a multi-axis stage, wherein the stage is translational and rotational along an axis;
- and
- positioning the multi-axis stage on a second stage.
The method as in claim in 31, further comprising observing the modification of the sample.
An apparatus for positioning a material in the appropriate location such that the material can be modified with a system, comprising:
- first means for multi-axis staging that is configured to accept the material on an outer surface, wherein the first means for multi-axis staging is configured to translate or rotate along at least one axis;
- and
- a second mean for staging with at least one axis of motion positioned on an opposing surface of the multi-axis stage.
A method for adding or removing material from a target surface with high precision relative to surface features comprising:
- positioning the sample on a multi-axis stage, wherein the stage is translational and rotational along an axis;
- positioning the multi-axis stage on a second stage;
- and
- directing a source of energy at or near the surface.
Dependencies are inferred from the claim text.