Substrate edge part cleaning apparatus and substrate edge part cleaning method

A substrate edge part cleaning method which is applied for a substrate edge part cleaning apparatus having:

• a substrate holding unit which holds a substrate for display;
• a cleaning head which cleans by wiping an edge part of the substrate while moving rectilinearly;
• and a camera which moves together with the cleaning head and captures an image of a proximity of an edge of a color filter which is placed on the substrate,
• wherein the camera obtains surface status information of a substrate part which has been cleaned, and
• the substrate edge part cleaning method further comprises
• judging cleaning degree based on the surface status information.

The substrate edge part cleaning method which is applied for a substrate edge part cleaning apparatus having:

• a substrate holding unit which holds a substrate for display;
• a cleaning head which cleans by wiping an edge part of the substrate while moving rectilinearly;
• and a camera which moves together with the cleaning head and captures an image of a proximity of an edge of a color filter which is placed on the substrate, said method comprising:
• detecting an edge position of the color filter placed on the substrate based on surface status information obtained by the camera;
• recognizing a positional relationship between the edge of the color filter and the cleaning head based on the positional relationship information;
• and
• adjusting the substrate position by driving the substrate holding unit to adjust the substrate position based on the position information obtained in said recognizing.